24 May 2018 Interferometric measuring systems of nanopositioning and nanomeasuring machines
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Abstract
The nanopositioning and nanomeasuring machines NMM-1 and NPMM-200 were developed at the Technische Universät Ilmenau. These machines realise the Abbe comparator principle and the Bryan principle in all three axes to achieve nanometre accuracy. The length measurements are carried out with fibre-coupled laser interferometers. The length and angle values are used together with the probe system signals for ultra-precision position control during surface and coordinate measurements. This paper presents the metrological concepts, the implemented designs as well as specific aspects of the interferometric measuring systems and the measurement uncertainty estimation.
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Tino Hausotte, Tino Hausotte, } "Interferometric measuring systems of nanopositioning and nanomeasuring machines", Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 106780Q (24 May 2018); doi: 10.1117/12.2318309; https://doi.org/10.1117/12.2318309
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