Micro Glass Blowing platform for microfabrication of microoptical components

C. Gorecki; J. Vincente Carrion; N. Passilly; S. Bargiel

doi:10.1117/12.2311305

24 May 2018 Micro Glass Blowing platform for microfabrication of microoptical components

C. Gorecki; J. Vincente Carrion; N. Passilly; S. Bargiel

Author Affiliations +

Proceedings Volume 10678, Optical Micro- and Nanometrology VII; 1067814 (2018) https://doi.org/10.1117/12.2311305
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of micro-optical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication methods of micro-optical components in borosilicate glass. As an example, an original concept of a micro-machined micro-axicons for generation of Bessel beams is demonstrated and experimentally validated.

Citation Download Citation

C. Gorecki, C. Gorecki, J. Vincente Carrion, J. Vincente Carrion, N. Passilly, N. Passilly, S. Bargiel, S. Bargiel, } "Micro Glass Blowing platform for microfabrication of microoptical components", Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 1067814 (24 May 2018); doi: 10.1117/12.2311305; https://doi.org/10.1117/12.2311305

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