24 May 2018 Micro Glass Blowing platform for microfabrication of microoptical components
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Abstract
The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of micro-optical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication methods of micro-optical components in borosilicate glass. As an example, an original concept of a micro-machined micro-axicons for generation of Bessel beams is demonstrated and experimentally validated.
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C. Gorecki, C. Gorecki, J. Vincente Carrion, J. Vincente Carrion, N. Passilly, N. Passilly, S. Bargiel, S. Bargiel, } "Micro Glass Blowing platform for microfabrication of microoptical components", Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 1067814 (24 May 2018); doi: 10.1117/12.2311305; https://doi.org/10.1117/12.2311305
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