Real-time high-speed motion blur compensation method using galvanometer mirror for shape sensing of microfabricated objects

Kenichi Murakami; Tomohiko Hayakawa; Jerome Pitogo de Leon; Masatoshi Ishikawa

doi:10.1117/12.2306621

24 May 2018 Real-time high-speed motion blur compensation method using galvanometer mirror for shape sensing of microfabricated objects

Kenichi Murakami, Tomohiko Hayakawa, Jerome Pitogo de Leon, Masatoshi Ishikawa

Author Affiliations +

Proceedings Volume 10679, Optics, Photonics, and Digital Technologies for Imaging Applications V; 106790Z (2018) https://doi.org/10.1117/12.2306621
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

In this paper, motion-blur compensation method for micro fabricated objects using a galvanometer mirror with back-and-forth rotation is proposed. Motion-blur compensation is expected to extend exposure time without motion blur because longer exposure time can decrease the intensity of illumination to avoid shape expansion of a target object by heat of illumination. Dealing with this demand, a galvanometer mirror is installed between the target and a 2D high-speed camera, and controls the optical axis of the camera to follow the moving target. Each continuous images are taken during the motion of the stage, and finally taken images are integrated into one image by patching for detecting fabrication error using image processing. The experimental system that consists of a high-speed camera, a galvanometer mirror and a high-precision stage is developed and a 20mm=/s moving drilled silicon nitride sheet having holes of about 40 μm in diameter are lattice-shaped at a pitch of 60 μm is captured without motion blur by using this system. Comparing captured images with still images in diameter, roundness and curvature of the each holes, the effectiveness of this system is validated.

Conference Presentation

Citation Download Citation

Kenichi Murakami, Tomohiko Hayakawa, Jerome Pitogo de Leon, and Masatoshi Ishikawa "Real-time high-speed motion blur compensation method using galvanometer mirror for shape sensing of microfabricated objects", Proc. SPIE 10679, Optics, Photonics, and Digital Technologies for Imaging Applications V, 106790Z (24 May 2018); https://doi.org/10.1117/12.2306621

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available