8 August 1989 Silicon Microstructure Sensors
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Abstract
A number of new low cost and high performance sensors are being made using silicon. These sensors are based on a collection of photolithographic and silicon wafer fabrication techniques borrowed from the integrated circuit industry that have been combined with new processes and structures to form a technology generally known as silicon micromachining. The result has been devices suitable for measuring such parameters as pressure, strain, acceleration or motion, and chemical concentration in markets ranging from medical through industrial, military aerospace, consumer and automotive. In many of these new markets, the precision or performance of traditional instrument grade parts is required in substantially high production volume and much lower cost. Silicon batch fabrication meets this requirement.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James W. Knutti, James W. Knutti, } "Silicon Microstructure Sensors", Proc. SPIE 1068, Catheter-Based Sensing and Imaging Technology, (8 August 1989); doi: 10.1117/12.952157; https://doi.org/10.1117/12.952157
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