9 May 2018 Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
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We report on the fabrication of an optical, highly-flexible thin film bending sensor which is based on diffused channel waveguide Bragg gratings inscribed into sheets of OrmoStamp hybrid polymers. The inorganic-organic Ormocer thin films are prepared by non-structured UV-enhanced imprint lithography which allows the fabrication of sheet-like slab substrates with a desired thickness. By this approach, 120 μm thin and highly-flexible plane-parallel substrates are achieved. For the inscription of the diffused channel waveguide Bragg gratings, a fast and efficient single writing step concept is applied, which allows the simultaneous inscription of both waveguide and Bragg grating in only a few seconds. The accordingly fabricated waveguide Bragg gratings feature a defined Bragg reflection peak that lies within the telecom wavelength range and is well-suited for sensing applications that require a reliable detection and tracking of the reflected Bragg wavelength. The applicability of the thus achieved devices as highly-flexible thin film bending sensors is investigated by means of deflection measurements. Here, we found a quasi-instantaneous and highly-reproducible response of the diffused channel waveguide Bragg gratings reflected Bragg wavelength to even small deflections which features a linear dependency of 6.05 × 10-4 nm/μm on the sensors displacement.
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Maiko Girschikofsky, Maiko Girschikofsky, Manuel Rosenberger, Manuel Rosenberger, Michael Förthner, Michael Förthner, Mathias Rommel, Mathias Rommel, Lothar Frey, Lothar Frey, Ralf Hellmann, Ralf Hellmann, "Flexible thin film bending sensor based on Bragg gratings in hybrid polymers", Proc. SPIE 10680, Optical Sensing and Detection V, 106800P (9 May 2018); doi: 10.1117/12.2303820; https://doi.org/10.1117/12.2303820


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