9 May 2018 Optical position encoder based on structured head diffraction grating
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Abstract
Optical position encoders working according to the interference method consists of a measurement scale and a measuring head moving along each other. The scale has a reflection diffraction grating on its surface and the measuring head has a transmission diffraction grating with same period inside. Laser light passing and diffracting through these two gratings creates an interference signal on an optical detector. Decoding of the interference signal phase allows to determinate current position. Known optical position encoders use complex optical schemes and some phase optical elements to form several quadrature signals with different phase for higher encoder accuracy. Previously we researched such kind of schemes [1, 2]. In this paper we propose to use a common optical scheme without phase elements but with a complex structured measuring head grating for this purpose to simplify an optical scheme and alignment requirements. The optical scheme of position encoder based on measuring head grating with specific structure is research and described in this paper.
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A. Y. Zherdev, A. Y. Zherdev, S. B. Odinokov, S. B. Odinokov, M. S. Kovalev, M. S. Kovalev, D. S. Lushnikov, D. S. Lushnikov, V. V. Markin, V. V. Markin, M. V. Shishova, M. V. Shishova, N. G. Stsepuro, N. G. Stsepuro, } "Optical position encoder based on structured head diffraction grating", Proc. SPIE 10680, Optical Sensing and Detection V, 106802K (9 May 2018); doi: 10.1117/12.2304939; https://doi.org/10.1117/12.2304939
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