Large (GeTe):(Sb2Te3) ratio phase change memory thin films

M. Bouska; S. Pechev; Q. Simon; V. Nazabal; J. Gutwirth; P. Nemec

doi:10.1117/12.2306503

17 May 2018 Large (GeTe):(Sb₂Te₃) ratio phase change memory thin films

M. Bouska, S. Pechev, Q. Simon, V. Nazabal, J. Gutwirth, P. Nemec

Proceedings Volume 10683, Fiber Lasers and Glass Photonics: Materials through Applications; 106830A (2018) https://doi.org/10.1117/12.2306503
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

Phase change memory thin films from Ge-Sb-Te system with large (GeTe):(Sb₂Te₃) ratio have been deposited via UV pulsed laser deposition technique. The studied compositions were Ge₆Sb₂Te₉, Ge₈Sb₂Te₁₁, Ge₁₀Sb₂Te₁₃, and Ge₁₂Sb₂Te₁₅. Physico-chemical properties of the Ge-Sb-Te thin films, based on the scanning electron microscopy with energydispersive X-ray analysis, X-ray diffraction and reflectometry, atomic force microscopy, optical reflectivity, sheet resistance temperature dependences, and variable angle spectroscopic ellipsometry measurements, were studied in order to assess the effect of chemical composition of the deposited layers. All the obtained data confirm the importance of GeTe content in (GeTe)_1-x(Sb₂Te₃)_x thin films.

Conference Presentation

Citation Download Citation

M. Bouska, S. Pechev, Q. Simon, V. Nazabal, J. Gutwirth, and P. Nemec "Large (GeTe):(Sb₂Te₃) ratio phase change memory thin films", Proc. SPIE 10683, Fiber Lasers and Glass Photonics: Materials through Applications, 106830A (17 May 2018); https://doi.org/10.1117/12.2306503

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