5 June 2018 Broad band optical monitoring of large area coatings produced using planetary rotation
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Abstract
The production of large area coatings in the vacuum chamber with the dimensions of 100×100×100 inches is considered. The chamber has the planetary rotation system with three planets. The original monitoring system with two broad band optical monitors combines the advantages of direct and indirect optical monitoring. The results of production of large area coatings are presented to illustrate the capabilities of the combined direct-indirect monitoring system.
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Valery Zhupanov, Valery Zhupanov, Viktor Fedoseev, Viktor Fedoseev, Pavel Novikov, Pavel Novikov, Dmitry Pavlyshin, Dmitry Pavlyshin, Ivan Kozlov, Ivan Kozlov, Alexander Tikhonravov, Alexander Tikhonravov, } "Broad band optical monitoring of large area coatings produced using planetary rotation", Proc. SPIE 10691, Advances in Optical Thin Films VI, 106910F (5 June 2018); doi: 10.1117/12.2311445; https://doi.org/10.1117/12.2311445
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