Improved calibration of vertical scanning optical profilometers for spherical profiles measurements

Jeremy Béguelin; Toralf Scharf; Wilfried Noell; Reinhard Voelkel

doi:10.1117/12.2306797

15 June 2018 Improved calibration of vertical scanning optical profilometers for spherical profiles measurements

Jeremy Béguelin, Toralf Scharf, Wilfried Noell, Reinhard Voelkel

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Proceedings Volume 10692, Optical Fabrication, Testing, and Metrology VI; 1069207 (2018) https://doi.org/10.1117/12.2306797
Event: SPIE Optical Systems Design, 2018, Frankfurt, Germany

Abstract

A new method for calibrating optical scanning profilometers is presented. Especially adapted to spherical and aspherical profile measurements, it shows an increase of accuracy bigger than one order of magnitude for radius of curvature measurements. Calibration of vertical scaling is obtained with a reduction of its uncertainty by a factor larger than 2, which also demonstrates the advantage of this method for any surface measurements. Using commercially available reference balls, this method is easily implementable.

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Jeremy Béguelin, Jeremy Béguelin, Toralf Scharf, Toralf Scharf, Wilfried Noell, Wilfried Noell, Reinhard Voelkel, Reinhard Voelkel, "Improved calibration of vertical scanning optical profilometers for spherical profiles measurements", Proc. SPIE 10692, Optical Fabrication, Testing, and Metrology VI, 1069207 (15 June 2018); doi: 10.1117/12.2306797; https://doi.org/10.1117/12.2306797

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