20 February 2018 Study on the convex dual-blazed grating
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Abstract
The high diffraction efficiency of the convex blazed gratings cannot be realized in the broadband. Therefore, we have designed the convex dual-blazed grating to realize higher and uniform diffraction efficiency in the wavelength from 0.4 μm to 2.5 μm. The diffraction efficiency of the convex dual-blazed grating is investigated by using rigorous coupled wave analysis. The results show: when the two blaze angles of the convex dual-blazed grating, one within the range from 2.7 degree to 3.4 degree and the other one within the range from 8 degree to 9 degree respectively, the first-order diffraction efficiency is more than 25 percent at the visible-near infrared band. The convex dual-blazed grating with the period of 5μm in the center will be fabricated by holographic lithography-segmented ion beam etching in late 2017.
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Quan Liu, Jianhong Wu, Peiliang Guo, Feng Zhou, "Study on the convex dual-blazed grating", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106972G (20 February 2018); doi: 10.1117/12.2315485; https://doi.org/10.1117/12.2315485
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