Fabrication technology of Si face and m face on 4H-SiC (0001) epi-layer based on molten KOH etching

Wen-kui Lin; Chun-hong Zeng; Yu-hua Sun; Xuan Zhang; Zhe Li; Tao-tao Yang; Tao Ju; Bao-shun Zhang

doi:10.1117/12.2307312

20 February 2018 Fabrication technology of Si face and m face on 4H-SiC (0001) epi-layer based on molten KOH etching

Wen-kui Lin, Chun-hong Zeng, Yu-hua Sun, Xuan Zhang, Zhe Li, Tao-tao Yang, Tao Ju, Bao-shun Zhang

Proceedings Volume 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application; 106974E (2018) https://doi.org/10.1117/12.2307312
Event: Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 2017, Nanjing, China

Abstract

Additional scattering of electrons in the complex MOSFET channel caused by off-cut angle of (0001) 4H-SiC wafer, makes accurate crystal face acquisition much desired. Molten KOH was used to etch the circular grooves on the SiC wafer surface in muffle furnace, and hexagonal grooves with SiC crystal symmetry were obtained. Average etching rates at 500°C along <;11-20> and <1-100> direction were about 4.826 um/min and 4.112 um/min, respectively,with a etching anisotropy ratio of 1.18. The m face was obtained by controlling the etching time and Si face was obtained by selfstopping effect. The method we developed in this paper has potential applications in the accurate crystal face acquisition of (0001) 4H-SiC epi-wafer, and the preparation of structures based on 4H-SiC.

Citation Download Citation

Wen-kui Lin, Chun-hong Zeng, Yu-hua Sun, Xuan Zhang, Zhe Li, Tao-tao Yang, Tao Ju, and Bao-shun Zhang "Fabrication technology of Si face and m face on 4H-SiC (0001) epi-layer based on molten KOH etching", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106974E (20 February 2018); https://doi.org/10.1117/12.2307312

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