20 February 2018 MEMS and micro sensor
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Abstract
This paper briefly introduces the concept of mems (micro-electro-mechanical system), analyzes the importance and some application in the aerospace field. Finally, this paper also discussed the mems in space application recommendations.
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Yan Hong, Yan Hong, Yanbin Cai, Yanbin Cai, } " MEMS and micro sensor ", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 1069759 (20 February 2018); doi: 10.1117/12.2307141; https://doi.org/10.1117/12.2307141
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