5 March 2018 Optical properties of YbF3-CaF2 composite thin films deposited by electron-beam evaporation
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Proceedings Volume 10710, Young Scientists Forum 2017; 107100L (2018) https://doi.org/10.1117/12.2309298
Event: Young Scientists Forum 2017, 2017, Shanghai, China
Abstract
We studied electron-beam evaporated YbF3-CaF2 composite films on ZnS substrate at different deposition parameters. The optical properties of films have been fitted, the surface roughness have been measured by AFM. The results of experiments indicated that increased the refractive indices, extinction coefficients, and surface roughness at higher deposition rate. The refractive index of composite film deposited by electron-beam evaporation with assisted-ion source was obviously higher than it without assisted-ion source.
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Songlin Wang, Songlin Wang, Gaoyuan Mi, Gaoyuan Mi, Jianfu Zhang, Jianfu Zhang, Chongmin Yang, Chongmin Yang, } "Optical properties of YbF3-CaF2 composite thin films deposited by electron-beam evaporation", Proc. SPIE 10710, Young Scientists Forum 2017, 107100L (5 March 2018); doi: 10.1117/12.2309298; https://doi.org/10.1117/12.2309298
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