Toward “defect-free” optics: a pioneering comprehensive metrology method

Jianda Shao; Jian Chen; Shijie Liu; Yuanan Zhao; Meiping Zhu; Kaizao Ni; Liang Ma; Wencai Li; Ming Huang

doi:10.1117/12.2317763

16 May 2018 Toward “defect-free” optics: a pioneering comprehensive metrology method

Jianda Shao, Jian Chen, Shijie Liu, Yuanan Zhao, Meiping Zhu, Kaizao Ni, Liang Ma, Wencai Li, Ming Huang

Proceedings Volume 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers; 1071304 (2018) https://doi.org/10.1117/12.2317763
Event: Pacific Rim Laser Damage 2018: Optical Materials for High Power Lasers, 2018, Yokohama, Japan

Abstract

In this paper, the concept of a mesoscopic method with high-speed and high-sensitivity is proposed for characterization of surface defects for large optics. The technology is a comprehensive integration of laser scattering method and highly sensitive photothermal method. The principle, experimental setup and preliminary measurement results are presented in detail in the paper. A statistical model for evaluation of mapping results of defects is also proposed to show the effectiveness of the comprehensive metrology method. The proposed method can detect non-destructively surface defects with high-speed and high-sensitivity at the mesoscopical level. It is a promising novel tool for mapping defects in meter size optics and hence it can provide clues to eliminate defects during the manufacturing processes and march toward “defect-free” optics.

Citation Download Citation

Jianda Shao, Jian Chen, Shijie Liu, Yuanan Zhao, Meiping Zhu, Kaizao Ni, Liang Ma, Wencai Li, and Ming Huang "Toward “defect-free” optics: a pioneering comprehensive metrology method", Proc. SPIE 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers, 1071304 (16 May 2018); https://doi.org/10.1117/12.2317763

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KEYWORDS

Laser scattering

Optics manufacturing

Absorption

Light scattering

Scattering

Metrology

Statistical analysis

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