16 May 2018 Toward “defect-free” optics: a pioneering comprehensive metrology method
Author Affiliations +
Proceedings Volume 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers; 1071304 (2018) https://doi.org/10.1117/12.2317763
Event: Pacific Rim Laser Damage 2018: Optical Materials for High Power Lasers, 2018, Yokohama, Japan
Abstract
In this paper, the concept of a mesoscopic method with high-speed and high-sensitivity is proposed for characterization of surface defects for large optics. The technology is a comprehensive integration of laser scattering method and highly sensitive photothermal method. The principle, experimental setup and preliminary measurement results are presented in detail in the paper. A statistical model for evaluation of mapping results of defects is also proposed to show the effectiveness of the comprehensive metrology method. The proposed method can detect non-destructively surface defects with high-speed and high-sensitivity at the mesoscopical level. It is a promising novel tool for mapping defects in meter size optics and hence it can provide clues to eliminate defects during the manufacturing processes and march toward “defect-free” optics.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianda Shao, Jian Chen, Shijie Liu, Yuanan Zhao, Meiping Zhu, Kaizao Ni, Liang Ma, Wencai Li, Ming Huang, "Toward “defect-free” optics: a pioneering comprehensive metrology method", Proc. SPIE 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers, 1071304 (16 May 2018); doi: 10.1117/12.2317763; https://doi.org/10.1117/12.2317763
PROCEEDINGS
14 PAGES


SHARE
Back to Top