Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer

M. Kosowska; D. Majchrowicz; K. J. Sankaran; M. Ficek; M. Jędrzejewska-Szczerska; M. K. Haenen

doi:10.1117/12.2314445

26 April 2018 Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer

M. Kosowska, D. Majchrowicz, K. J. Sankaran, M. Ficek , M. Jędrzejewska-Szczerska, M. K. Haenen

Proceedings Volume 10716, Saratov Fall Meeting 2017: Optical Technologies in Biophysics and Medicine XIX; 1071614 (2018) https://doi.org/10.1117/12.2314445
Event: Saratov Fall Meeting 2017, 2017, Saratov, Russian Federation

Abstract

In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH₄, H₂ and N₂ gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.

Citation Download Citation

M. Kosowska, D. Majchrowicz, K. J. Sankaran, M. Ficek , M. Jędrzejewska-Szczerska, and M. K. Haenen "Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer", Proc. SPIE 10716, Saratov Fall Meeting 2017: Optical Technologies in Biophysics and Medicine XIX, 1071614 (26 April 2018); https://doi.org/10.1117/12.2314445

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