Plasmonic resonator devices for integrated application (Conference Presentation)

Masanobu Haraguchi; Shun Kamada; Hiroyuki Okamoto; Toshihiro Okamoto; Salah El-Zohary; Kenzo Yamaguchi; Atsushi Mori

doi:10.1117/12.2320975

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17 September 2018 Plasmonic resonator devices for integrated application (Conference Presentation)

Masanobu Haraguchi, Shun Kamada, Hiroyuki Okamoto, Toshihiro Okamoto, Salah El-Zohary, Kenzo Yamaguchi, Atsushi Mori

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Proceedings Volume 10722, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVI; 107220K (2018) https://doi.org/10.1117/12.2320975
Event: SPIE Nanoscience + Engineering, 2018, San Diego, California, United States

Abstract

Recently, various surface plasmon polariton (SPP) resonator structures with a tiny volume and a sharp resonance are numerically proposed for sensor, filter and modulator integrated devices. However, there are few experimental demonstrations of such the structure, i.e., a combination of SPP resonator and SPP waveguide, in the range from visible to telecommunication wavelength. We will present several tiny SPP resonator devices with SPP I/O ports, i.e., a combination of SPP resonator with a volume of less than 1 squared micrometer and a channel-type SPP waveguide with a width of 200 nm width. We have fabricated such the resonators for integrated applications by using EB lithography technique and evaluated their optical resonance characteristics for a refractive index sensor in the telecommunication wavelength region. And we will discuss key points to achieve enough performance as integrated functional devices for real applications.

Conference Presentation

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Masanobu Haraguchi, Shun Kamada, Hiroyuki Okamoto, Toshihiro Okamoto, Salah El-Zohary, Kenzo Yamaguchi, and Atsushi Mori "Plasmonic resonator devices for integrated application (Conference Presentation)", Proc. SPIE 10722, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVI, 107220K (17 September 2018); https://doi.org/10.1117/12.2320975

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