Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser

Min-Soo Kim; Hyun-Taek Lee; Kang-In Lee; Sung-Hoon Ahn

doi:10.1117/12.2320943

19 September 2018 Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser

Min-Soo Kim, Hyun-Taek Lee, Kang-In Lee, Sung-Hoon Ahn

Author Affiliations +

Proceedings Volume 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV; 1073016 (2018) https://doi.org/10.1117/12.2320943
Event: SPIE Nanoscience + Engineering, 2018, San Diego, California, United States

Abstract

Great potential in medical applications makes that micro robot has been researched by several research groups. In this research, we demonstrates shape memory alloy (SMA) based micro robot. SMA wire, which has 25 μm of diameter, is cut and patterned by focused ion beam milling to fabricate shape of robot. The robot consists of diamond-shaped structures contracted and relaxed by two-way shape memory effect, and cuboid features that contact to ground. The robot is powered by ultraviolet laser and actuated using photothermal effect. It can move forward with speed of 2.5 μm/s. We anticipate that the SMA usage in micro robot can expand flexibility of material selection and enhance its functionality.

Citation Download Citation

Min-Soo Kim, Hyun-Taek Lee, Kang-In Lee, and Sung-Hoon Ahn "Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser", Proc. SPIE 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV, 1073016 (19 September 2018); https://doi.org/10.1117/12.2320943

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