19 September 2018 Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser
Author Affiliations +
Abstract
Great potential in medical applications makes that micro robot has been researched by several research groups. In this research, we demonstrates shape memory alloy (SMA) based micro robot. SMA wire, which has 25 μm of diameter, is cut and patterned by focused ion beam milling to fabricate shape of robot. The robot consists of diamond-shaped structures contracted and relaxed by two-way shape memory effect, and cuboid features that contact to ground. The robot is powered by ultraviolet laser and actuated using photothermal effect. It can move forward with speed of 2.5 μm/s. We anticipate that the SMA usage in micro robot can expand flexibility of material selection and enhance its functionality.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min-Soo Kim, Hyun-Taek Lee, Kang-In Lee, and Sung-Hoon Ahn "Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser", Proc. SPIE 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV, 1073016 (19 September 2018); doi: 10.1117/12.2320943; https://doi.org/10.1117/12.2320943
PROCEEDINGS
5 PAGES


SHARE
Advertisement
Advertisement
Back to Top