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14 September 2018 Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry
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Abstract
A new calibration method is proposed to separate the profile error caused by the sphericity of the scanning stylus in 3- dimensional contact profilometry. To reduce uncertainty in surface profile measurements, compensation of the stylus sphericity has become a critical issue. In optical flat testing, the three-flat method, which can separate the reference error from the measured deviations, is well known. Although there are also several methods of calibration of the stylus sphericity in contact profilometry, to extract the error precisely remains a challenge. Here we consider a new algorithm for this that uses four measurements including new combinations of the two styluses. The algorism yields four deviation data of the sum of the object profile and the stylus sphericity. With this method, we can extract the surface profile, while keeping the stylus error minimum.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasunari Nagaike, Toshiki Kumagai, and Kenichi Hibino "Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry", Proc. SPIE 10742, Optical Manufacturing and Testing XII, 107420W (14 September 2018); https://doi.org/10.1117/12.2319572
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