18 August 2018 Specification and measurement of uncertainty in phase shifting Fizeau interferometry
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Abstract
Understanding measurement uncertainty is critical for qualifying an instrument for a specific task and for improving the instrument’s performance. Specifying that uncertainty requires a precise definition of the particular quantity being measured and the conditions under which it is measured. These should both be relevant to the end user’s application. In this paper I re-examine and summarize some of the definitions and test methods that have been used to characterize Fizeau interferometers and attempt to encourage a discussion about how to best specify the performance of Fizeau interferometers for today’s demanding applications.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brent C. Bergner "Specification and measurement of uncertainty in phase shifting Fizeau interferometry", Proc. SPIE 10749, Interferometry XIX, 107490S (18 August 2018); doi: 10.1117/12.2323640; https://doi.org/10.1117/12.2323640
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