Synthetic aperture phase-shifting interferometry for high numerical-aperture spherical surface measurement

Toshiki Kumagai; Yasunari Nagaike; Kenichi Hibino

doi:10.1117/12.2319643

18 August 2018 Synthetic aperture phase-shifting interferometry for high numerical-aperture spherical surface measurement

Toshiki Kumagai, Yasunari Nagaike, Kenichi Hibino

Author Affiliations +

Proceedings Volume 10749, Interferometry XIX; 1074915 (2018) https://doi.org/10.1117/12.2319643
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

We propose a synthesis of phase-shifting algorithms for Fizeau interferometry of high numerical-aperture spherical surfaces. Several approaches have been reported for spherical surface measurements such as phase shifting, carrier fringe, and wavelength tuning. The commonly used method of phase shifting with mechanical phase modulation suffers from spatial nonuniformity of the phase step within the observing aperture. We operated seven algorithms designed for different phase steps on the same set of interference fringes recorded in a one phase-shift sequence, and determined the object phase from each of the algorithms depending on the aperture position. The resultant phase distribution showed minimum systematic errors.

Citation Download Citation

Toshiki Kumagai, Yasunari Nagaike, and Kenichi Hibino "Synthetic aperture phase-shifting interferometry for high numerical-aperture spherical surface measurement", Proc. SPIE 10749, Interferometry XIX, 1074915 (18 August 2018); https://doi.org/10.1117/12.2319643

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