Developments of EUV/x-ray wavefront sensors and adaptive optics at Imagine Optic

Ombeline de La Rochefoucauld; Samuel Bucourt; Daniele Cocco; Guillaume Dovillaire; Fabrice Harms; Mourad Idir; Dietmar Korn; Xavier Levecq; Agathe Marmin; Lionel Nicolas; Martin Piponnier; Lorenzo Raimondi; Philippe Zeitoun

doi:10.1117/12.2320927

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2 October 2018 Developments of EUV/x-ray wavefront sensors and adaptive optics at Imagine Optic

Ombeline de La Rochefoucauld, Samuel Bucourt, Daniele Cocco, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Dietmar Korn, Xavier Levecq, Agathe Marmin, Lionel Nicolas, Martin Piponnier, Lorenzo Raimondi, Philippe Zeitoun

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Proceedings Volume 10761, Adaptive X-Ray Optics V; 107610E (2018) https://doi.org/10.1117/12.2320927
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

Imagine Optic (IO) is actively developing EUV to X-ray wavefront (WF) sensors since 2003 for applications on metrology of EUV to X-ray beams emitted by synchrotrons, free-electron lasers, plasma-based soft X-ray lasers and high harmonic generation. Our sensors have demonstrated their high usefulness for metrology of EUV to X-ray optics from single flat or curved mirrors to more complex optical systems (Schwarzschild, Kirkpatrick-Baez static or based on bender technology or with activators). Our most recent developments include the realization of a EUV sensor adapted to strongly convergent or divergent beams having numerical aperture as high as 0.15, as well as the production of a hard X-ray sensor working at 10 keV and higher energies, providing repeatability as good as 4 pm rms. We present a review of the developed sensors, as well as experimental demonstrations of their benefits for various metrology and WF optimization requirements.

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Ombeline de La Rochefoucauld, Samuel Bucourt, Daniele Cocco, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Dietmar Korn, Xavier Levecq, Agathe Marmin, Lionel Nicolas, Martin Piponnier, Lorenzo Raimondi, and Philippe Zeitoun "Developments of EUV/x-ray wavefront sensors and adaptive optics at Imagine Optic", Proc. SPIE 10761, Adaptive X-Ray Optics V, 107610E (2 October 2018); https://doi.org/10.1117/12.2320927

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