Translator Disclaimer
17 October 2018 Development of the new long trace profilometer at LCLS for bendable x-ray mirror metrology
Author Affiliations +
The Linac Coherent Light Source (LCLS) is undergoing an upgrade to a double source setup to provide eight experimental hutches (five existing and three new) with either high-repetition or high-intensity pulses and highly coherent X-ray beams. The photon transportation and distribution to each hutch relies on, among other elements, bendable mirrors. Given the coherence of the LCLS source, and to avoid introducing wavefront distortions beyond workable limits, the mirrors need to have extremely smooth surfaces, with a figure compliant with the nominal profile (usually elliptical). The effectiveness and the accuracy of the bending system and of the actuators over the entire length of the mirror (up to 1.2 m) need to be assessed by an appropriate metrology system. Long Trace Profilometry (LTP) is a suitable technique to characterize a slightly-curved surface mirror profile with very high sensitivity, provided that the optomechanical system implementation enables sensitivity and accuracy values compatible with the mentioned surface quality requirements. In this paper, we show the status and performance of the LTP under development at LCLS. The LTP essentially consists of an advanced optical head that endows a laser beam with sharp interferential features to increase its resolution and detects the optical lever of the beam reflected by the sample, plus a high-precision gantry system (Q-Sys) for accurate scanning of the mirror under test, under impact of its bending mechanics and cooling system. The measured results are compared to the simulated performance of the LTP, and we show the way of the oncoming improvement of the instrument.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. L. Ng, J. Nicolas, D. Spiga, C. L. Hardin, D. S. Morton, and D. Cocco "Development of the new long trace profilometer at LCLS for bendable x-ray mirror metrology", Proc. SPIE 10761, Adaptive X-Ray Optics V, 1076106 (17 October 2018);


Metrological Evaluation Of Grazing Incidence Mirrors
Proceedings of SPIE (March 24 1982)
Incoherent x-ray mirror surface metrology
Proceedings of SPIE (November 01 1997)
In-Process Metrology For X-Ray Optics
Proceedings of SPIE (February 13 1987)
Off-synchrotron at-wavelength EUV metrology
Proceedings of SPIE (May 06 2005)
Mirror metrology and bender characterization at ESRF
Proceedings of SPIE (September 16 2005)

Back to Top