Translator Disclaimer
9 October 2018 High volume manufacturing of optical MEMS devices using biomass nano-patterning materials and ecofriendly developable lithography processes
Author Affiliations +
Abstract
The present study aims to achieve high volume manufacturing of nanofabrication techniques for optical MEMS devices and expand the resolution limits of ecofriendly developable processes in advanced lithography using the new family of positive-tone nano-patterning materials derived from biomass. The volume manufacturing of nanofabrication techniques and resolution limits of the ecofriendly developable processes using the 50 nm positive-tone nano-patterning materials was dramatically improved by changing and approached the existing resolution limits of non-ecofriendly development processes involving highly toxic organic solvents and tetramethylammonium hydroxide. The newly biomass material and the ecofriendly processes are expected as one of the nanofabrication techniques in next generation optical MEMS devices.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Satoshi Takei "High volume manufacturing of optical MEMS devices using biomass nano-patterning materials and ecofriendly developable lithography processes", Proc. SPIE 10787, Environmental Effects on Light Propagation and Adaptive Systems, 107870W (9 October 2018); https://doi.org/10.1117/12.2324962
PROCEEDINGS
7 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Dots-on-the-fly electron beam lithography
Proceedings of SPIE (March 22 2016)
EUV underlayer materials for 22nm HP and beyond
Proceedings of SPIE (April 15 2011)
Organic antireflective coatings for 193-nm lithography
Proceedings of SPIE (June 11 1999)

Back to Top