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6 July 1989 Multi-Beam Laser Plotter For Glass Plates
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Proceedings Volume 1079, Hard Copy Output; (1989) https://doi.org/10.1117/12.952788
Event: OE/LASE '89, 1989, Los Angeles, CA, United States
Abstract
We have developed a high-speed, high-precision raster-scan laser plotter for producing images on glass plates. This system is designed for producing precision photo masks used for various electronic devices such flat panel displays as liquid crystal, plasma, fluorescent tube, thermal printer heads, and IC lead frames. The multi-beam laser plotter splits an argon ion laser beam into 40 separate beams, each of which can be individually switched ON or OFF by two multi Acoustic Optical Modulators (AGMs). It works using the raster-scan method, moving the glass plate backward and forward to produce a photo mask. It takes approximately five hours to complete plotting on a photo mask of 500 x 600 mm with a laser spot diameter of 5μmø, a pixel pitch of 2.5μm, and a plotting accuracy of ±5/μm, producing precise and uniform image quality throughout the mask. Because the image is produced by raster-scanning, it is possible to plot a mask of a given size in a fixed time regardless of variations in image data volume. This plotter can therefore produce a standard photo mask in a fraction of the time needed by conventional vector-type photoplotters.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Akira Kuwabara, Koji Ozaki, and Takumi Yoshida "Multi-Beam Laser Plotter For Glass Plates", Proc. SPIE 1079, Hard Copy Output, (6 July 1989); https://doi.org/10.1117/12.952788
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