25 July 1989 Visualization of VLSI integrated circuits by means of ferroelectric liquid crystals
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The increasing density and complexity of integrated circuits illustrates the quick evolution of their technology. As a consequence, new methods of internal testing are now necessary for failure analysis that allow for the visualization of the internal functioning of these circuits. In this way such methods as electronic microscopy working in the voltage contrast process have been developed a longtime ago. An alternate promising method uses liquid crystals for the visualization of electric fields present on the surface of the chip. In this article we investigate the various potentialities of the nematic and smectic mesophases for such a visualization. We will especially underline the use of new ferroelectric liquid crystals which could allow for the dynamical analysis of integrated circuits.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Picart, B. Picart, L. Dugoujon, L. Dugoujon, O. Petit, O. Petit, C. Destrade, C. Destrade, C. Leon, C. Leon, H. T. Nguyen, H. T. Nguyen, J. P. Marcerou, J. P. Marcerou, } "Visualization of VLSI integrated circuits by means of ferroelectric liquid crystals", Proc. SPIE 1080, Liquid Crystal Chemistry, Physics, and Applications, (25 July 1989); doi: 10.1117/12.976410; https://doi.org/10.1117/12.976410

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