In this paper, we introduce Y2O3 coating film fluorination after plasma treatment. Y-F and Y-O bonding energies change after plasma treatment was observed with X-ray photoelectron spectroscopy (XPS). Expect fluorinated surface can prolong protective lifetime in Cl2 plasma condition.
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Yuan Hsu, Yutaka Satou, "Advanced ceramic protective lifetime prolong for particle control," Proc. SPIE 10807, Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology, 108070J (12 June 2018);