Technology of field effect transistor with DLC layer in gate area

Piotr Firek; Aleksander Werbowy; Mateusz Śmietana

doi:10.1117/12.2501537

1 October 2018 Technology of field effect transistor with DLC layer in gate area

Piotr Firek, Aleksander Werbowy, Mateusz Śmietana

Proceedings Volume 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018; 1080852 (2018) https://doi.org/10.1117/12.2501537
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 2018, Wilga, Poland

Abstract

This work presents a technology of manufacturing silicon Metal Insulator Semiconductor/Ion Sensitive Field Effect Transistors (MIS/IS FETs) with DLC (Diamond-Like Carbon) as well as SiO₂/DLC thin films in the role of gate dielectric. The crucial element of fabrication process was gate dielectric layer preparation. In the first case a thin DLC film was obtained by means of Radio Frequency Plasma Assisted Chemical Vapour Deposition (RF PECVD) directly onto the Si in the transistor gate area. In the second case whereas, prior to DLC deposition, a thin silicon dioxide buffer film was grown there using the high-temperature oxidation process. The photolithography allowed to open windows for formation of electric metal (Al) contacts to transistor source and drain regions. Contacts were obtained by means of vacuum evaporation. Subsequently, transfer and output current-voltage (I-V) characteristics of so produced transistors were measured and studied.

Citation Download Citation

Piotr Firek, Aleksander Werbowy, and Mateusz Śmietana "Technology of field effect transistor with DLC layer in gate area", Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 1080852 (1 October 2018); https://doi.org/10.1117/12.2501537

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available