Cantilever-based microring lasers embedded in a flexible substrate for strain and index gauges

Taojie Zhou; Guohong Xiang; Xuan Fang; Xiu Liu; Boyuan Xiang; Zhaoyu Zhang

doi:10.1117/12.2502415

5 November 2018 Cantilever-based microring lasers embedded in a flexible substrate for strain and index gauges

Taojie Zhou, Guohong Xiang, Xuan Fang, Xiu Liu, Boyuan Xiang, Zhaoyu Zhang

Proceedings Volume 10814, Optoelectronic Devices and Integration VII; 108140E (2018) https://doi.org/10.1117/12.2502415
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

A cantilever-based microring laser structure was proposed for easily integrating III-V active layer into mechanically stretchable substrates. Local strain gauges were demonstrated by embedding cantilever-based microring lasers in a deformable polymer substrate. The characterizations of microscale local strain gauges had been studied from both simulated and experimental results. The lasing wavelength of strain gauges was blue-shift and linear tuned by stretching the flexible substrate. Gauge factor being ~11.5 nm per stretching unit was obtained for a cantilever-based microring laser with structural parameters R=1.25 μm, W₁=450 nm and W₂=240 nm. Such microring lasers embedded in a flexible substrate are supposed to function not only as strain gauges for monitoring the micro- or nano-structured deformation, but also tunable light sources for photonic integrated circuits

Citation Download Citation

Taojie Zhou, Guohong Xiang, Xuan Fang, Xiu Liu, Boyuan Xiang, and Zhaoyu Zhang "Cantilever-based microring lasers embedded in a flexible substrate for strain and index gauges", Proc. SPIE 10814, Optoelectronic Devices and Integration VII, 108140E (5 November 2018); https://doi.org/10.1117/12.2502415

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