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5 November 2018 Surface passivation of 1550nm AlxInyAsSb avalanche photodiode
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Abstract
We report three kinds of surface passivation for AlxInyAsSb APD, which are SiO2, SiO2 after sulfuration and SU8 2005 treatments. A good sidewall profile of mesas were etch by Inductively Coupled Plasma (ICP) to 2.6μm depth. The order of dark current for device with SU8 passivation is less than -12 under the temperature of 100K. Dark current and photocurrent increase linearly with diameter of mesa. Also, the devices with different passivation methods produce photocurrent excited by incident power. The measurements are consistent with CV modeling and electric field simulations.
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Chunyan Guo, Yuexi Lv, Da’nong Zheng, Yaoyao Sun, Zhi Jiang, Dongwei Jiang, Guowei Wang, Yingqiang Xu, Tao Wang, Jinshou Tian, Zhaoxin Wu, and Zhichuan Niu "Surface passivation of 1550nm AlxInyAsSb avalanche photodiode", Proc. SPIE 10814, Optoelectronic Devices and Integration VII, 1081416 (5 November 2018); https://doi.org/10.1117/12.2500523
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