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5 November 2018 Optical design of high-aperture lens objectives for NUV and DUV spectral ranges
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Abstract
The aspects of the use of dioptric optics for DUV microscopy are considered. The transition to the NUV and DUV range can significantly improve the resolving power of the microscope. Different kinds of crystals can be used as optical materials.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dmitry N. Frolov, Olga A. Vinogradova, Georgi Burdzhanadze, and Liyun Wen "Optical design of high-aperture lens objectives for NUV and DUV spectral ranges", Proc. SPIE 10816, Advanced Optical Imaging Technologies, 108161V (5 November 2018); https://doi.org/10.1117/12.2504676
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