High-precision 3D measurement of large-sized rough glass using phase-shifting and phase-height mapping

Chao Li; Changhe Zhou; Yu Yan; Fantao Bu

doi:10.1117/12.2500943

6 November 2018 High-precision 3D measurement of large-sized rough glass using phase-shifting and phase-height mapping

Chao Li, Changhe Zhou, Yu Yan, Fantao Bu

Proceedings Volume 10818, Holography, Diffractive Optics, and Applications VIII; 108180O (2018) https://doi.org/10.1117/12.2500943
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

In this paper, a non-contact, fast and high-precision optical 3D measurement method is proposed to provide a detection scheme for the processing of optical rough glass in the grinding stage. We first use a planar calibration board to map the phase-height of the optical rough glass in a certain spatial range, then use the phase-shifting method to obtain the heightmodulated phase distribution of the rough glass. Finally, the 3D profile of the whole rough glass is obtained based on the phase-height mapping. The whole detection process can be completed in a few minutes, and the accuracy is less than 100 microns.

Citation Download Citation

Chao Li, Changhe Zhou, Yu Yan, and Fantao Bu "High-precision 3D measurement of large-sized rough glass using phase-shifting and phase-height mapping", Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108180O (6 November 2018); https://doi.org/10.1117/12.2500943

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