The fabrication and measurement of gold reflective grating

Fantao Bu; Yunkai Lu; Changhe Zhou; Minkang Li; Yingjie Yu

doi:10.1117/12.2500811

8 November 2018 The fabrication and measurement of gold reflective grating

Fantao Bu, Yunkai Lu, Changhe Zhou, Minkang Li, Yingjie Yu

Proceedings Volume 10818, Holography, Diffractive Optics, and Applications VIII; 1081810 (2018) https://doi.org/10.1117/12.2500811
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Diffraction grating is widely used in a variety of applications, and the grating must have good quality. In various methods of making large-sized gratings, laser direct writing has obvious advantages. Our research group uses the parallel direct laser writing technology to produce a sinusoidal grating with a size of 100×100mm and line number of 1780 per millimeter. Firstly, the grating is analyzed theoretically to find a groove depth where the sinusoidal grating can reach its highest efficiency, then the grating is produced by laser direct writing and finally coated with a layer of gold. In this paper, we introduce the fabrication and efficiency measurement of grating, and estimate its uniformity. We get 16×16 data points which is divided into 4×3 area from the measurement. For each small area, the efficiency is measured and processed by software, obtaining the efficiency distribution diagram. Most efficiencies are around 90%, which is close to the theoretical calculation. Meanwhile, the efficiency distribution is uniform. Experimental results demonstrated that the developed parallel direct laser writing technology is feasible for writing large-size grating.

Citation Download Citation

Fantao Bu, Yunkai Lu, Changhe Zhou, Minkang Li, and Yingjie Yu "The fabrication and measurement of gold reflective grating", Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 1081810 (8 November 2018); https://doi.org/10.1117/12.2500811

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KEYWORDS

Diffraction gratings

Diffraction

Laser applications

Polarization

Gold

Lithography

Power meters

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