Grating interferometry with high optical subdivision

Shiyao Zhu; Changhe Zhou; Minkang Li; Chunlong Wei; Junjie Yu

doi:10.1117/12.2500576

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6 November 2018 Grating interferometry with high optical subdivision

Shiyao Zhu, Changhe Zhou, Minkang Li, Chunlong Wei, Junjie Yu

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Proceedings Volume 10818, Holography, Diffractive Optics, and Applications VIII; 108181O (2018) https://doi.org/10.1117/12.2500576
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

In this paper, we propose a high-density grating interferometry system, which can be applied to measure displacement on the nanometer precision. We make use of the optical subdivision module to improve the measurement resolution which is better than the traditional one. The core part of the whole system is a grating with high-density of 1780 lines/mm and long-range of 100mm*100mm. The apparatus adopts a symmetrical structure to reduce the error resulting from environmental disturbance. The system provides a novel measurement technique to improve the grating interferometry. The experimental results show that the grating interferometer system has good stability, and the in-situ measurement error is within ±5 nm for a long time. The grating interferometer can measure the short distance displacement of 30 nm and can control the error within ±2 nm. The measurement of the distance of 10 mm can control the error within ±20 nm. The results proves the feasibility of our proposed improved.

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Shiyao Zhu, Changhe Zhou, Minkang Li, Chunlong Wei, and Junjie Yu "Grating interferometry with high optical subdivision", Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108181O (6 November 2018); https://doi.org/10.1117/12.2500576

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