Polarization aberration measurement of lithographic tools

Shuang Xu; Gongfa Li; Bo Tao; Yongxing Guo

doi:10.1117/12.2500778

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7 November 2018 Polarization aberration measurement of lithographic tools

Shuang Xu, Gongfa Li, Bo Tao, Yongxing Guo

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Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081909 (2018) https://doi.org/10.1117/12.2500778
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

The NA of immersion lithography has reached 1.35, in which case polarization effect must be taken into account. The performance of the projection lens should be characterized by polarization aberration. We proposed a polarization aberration measurement theory and method, using the binary grating structure as the mask pattern, with intensity distribution signal as the measuring signal. Pauli Zernike polynomials are adopted to characterizing the polarization aberration, and a linear relationship between intensity signal and Pauli Zernike coefficients was derived. Simulation results show that using the proposed method, the polarization aberration can be reconstructed with relative error of refactoring to 10^-2.

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Shuang Xu, Gongfa Li, Bo Tao, and Yongxing Guo "Polarization aberration measurement of lithographic tools", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081909 (7 November 2018); https://doi.org/10.1117/12.2500778

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