Cylindrical surface measurement

Sen Han; Peng Wu; Xin Huang; Hao Sun; Fang Wang

doi:10.1117/12.2501186

8 November 2018 Cylindrical surface measurement

Sen Han, Peng Wu, Xin Huang, Hao Sun, Fang Wang

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081911 (2018) https://doi.org/10.1117/12.2501186
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Cylindrical surface is widely used for modern industry. However, cylindrical surface measurement has become a quite difficult problem. In this paper, we will present coherent technique to measure cylindrical surface, including cylindrical surface and cylindrical ring. Inner surfaces measurement of cylindrical ring can be achieved without map stitching, by a Fizeau interferometer with a 90°conical mirror. The alignment of this arrangement, however, is very crucial to the accomplishment. Any small misplacement of 90° cone or hollow cylinder from their ideal settings may result in large measurement errors. These errors are not intuitive and hard to be removed if their origins are not well understood. In other words, it is very important to know how these measurement errors are generated from the optical misalignment in order to eliminate them. Finally, we have aligned our experimental setup and gotten some results which were so closed with our theoretical analysis.

Citation Download Citation

Sen Han, Peng Wu, Xin Huang, Hao Sun, and Fang Wang "Cylindrical surface measurement", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081911 (8 November 2018); https://doi.org/10.1117/12.2501186

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