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6 November 2018 Surface measurement of axicon lens based on polarization phase-shifting interferometry
Zhangfan Wei, Aijun Zeng, Qiao Yuan, Jingpei Hu, Huijie Huang
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Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 108191R (2018) https://doi.org/10.1117/12.2501224
Event: SPIE/COS Photonics Asia, 2018, Beijing, China
Abstract
Axicon is widely used in optical alignment and Bessel–Gauss beam generation. There are rigorous requirements for a highly accurate surface metrology. In this paper, a polarization phase-shifting interferometer measurement method using a concave axicon mirror is proposed to obtain the surface of axicon lens. The measuring beam produced by a polarization phase-shifting interferometer is incident on the flat surface of an axicon lens under test perpendicularly and it is reflected along the original optical path by a concave axicon mirror, which is easy to be manufactured by ultra-precision diamond-turning machine. The reflected beam by the concave axicon mirror interferes with the reflected reference beam by transmission flat (TF) in the interferometer. Consequently, the surface of the axicon lens can be obtained. The measurement method is simple, timesaving and easy to achieve surface metrology of axicon lens of any cone angle. In experiments, the evaluation parameters of the axicon surface profile errors are given by the peak-to-valley(PV) error and Root-Mean-Square(RMS) error. The measurement results verify that the measurement for axicon can be achieved by the proposed method which plays a crucial role in evaluating the manufacturing and image qualities of axicon.
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Zhangfan Wei, Aijun Zeng, Qiao Yuan, Jingpei Hu, and Huijie Huang "Surface measurement of axicon lens based on polarization phase-shifting interferometry", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108191R (6 November 2018); https://doi.org/10.1117/12.2501224
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KEYWORDS
Axicons
Mirrors
Interferometers
Interferometry
Metrology
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