A surface plasmon resonance sensor based on silicon-on-insulator rib waveguide

Yueming Liu; Xi Wang; Ying Ding; Xiaohao Wang

doi:10.1117/12.2504272

23 October 2018 A surface plasmon resonance sensor based on silicon-on-insulator rib waveguide

Yueming Liu, Xi Wang, Ying Ding, Xiaohao Wang

Proceedings Volume 10821, Advanced Sensor Systems and Applications VIII; 1082104 (2018) https://doi.org/10.1117/12.2504272
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Taking the advantages of SOI rib waveguide, a compact and efficient SPR sensor based on SOI rib waveguide is proposed. Ribs and air trenches are formed by ICP deep etch on SOI wafer. Then, the metal film for SPR is sputtered on the sidewall of the air trench. A tunable laser and an optical power meter are used to test the sensor. The sensor with micron dimensions can be directly end face coupled with the single-mode fibers of the laser and the power meter. Resonance curves of water and milk are obtained. The sensitivity of the sensor can reach 1200nm/RIU.

Citation Download Citation

Yueming Liu, Xi Wang, Ying Ding, and Xiaohao Wang "A surface plasmon resonance sensor based on silicon-on-insulator rib waveguide", Proc. SPIE 10821, Advanced Sensor Systems and Applications VIII, 1082104 (23 October 2018); https://doi.org/10.1117/12.2504272

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available