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23 October 2018 A surface plasmon resonance sensor based on silicon-on-insulator rib waveguide
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Abstract
Taking the advantages of SOI rib waveguide, a compact and efficient SPR sensor based on SOI rib waveguide is proposed. Ribs and air trenches are formed by ICP deep etch on SOI wafer. Then, the metal film for SPR is sputtered on the sidewall of the air trench. A tunable laser and an optical power meter are used to test the sensor. The sensor with micron dimensions can be directly end face coupled with the single-mode fibers of the laser and the power meter. Resonance curves of water and milk are obtained. The sensitivity of the sensor can reach 1200nm/RIU.
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Yueming Liu, Xi Wang, Ying Ding, and Xiaohao Wang "A surface plasmon resonance sensor based on silicon-on-insulator rib waveguide", Proc. SPIE 10821, Advanced Sensor Systems and Applications VIII, 1082104 (23 October 2018); https://doi.org/10.1117/12.2504272
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