Surface measurement through transparent medium using Linnik type white-light spectral interferometer

Tong Guo; Qianwen Weng; Zhuo Chen; Xing Fu; Xiaotang Hu

doi:10.1117/12.2500066

24 July 2018 Surface measurement through transparent medium using Linnik type white-light spectral interferometer

Tong Guo, Qianwen Weng, Zhuo Chen, Xing Fu, Xiaotang Hu

Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018); 1082705 (2018) https://doi.org/10.1117/12.2500066
Event: Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 2018, Shanghai, China

Abstract

According to the requirement for high precision surface measurement in the special conditions, a Linnik type measuring system with long working distance was built up based on white-light microscopic spectral interferometry. The influence of the transparent medium on the interferogram was minimized by the optical path compensation in the reference beam of the interferometer. Surface profile and film thickness can be obtained accurately after the optical path compensation and nonlinear phase error correction. The measuring results with and without transparent medium were compared to show the feasibility of the proposed methods, including displacement, profile and film thickness measurement. And experiments on the surface with complex profile and the film standard showed that the system still kept the nanoscale accuracy through transparent medium.

Citation Download Citation

Tong Guo, Qianwen Weng, Zhuo Chen, Xing Fu, and Xiaotang Hu "Surface measurement through transparent medium using Linnik type white-light spectral interferometer", Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 1082705 (24 July 2018); https://doi.org/10.1117/12.2500066

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