Applications of optical coherence in interferometric metrology

Peter J. de Groot

doi:10.1117/12.2319106

7 September 2018 Applications of optical coherence in interferometric metrology

Peter J. de Groot

Proceedings Volume 10834, Speckle 2018: VII International Conference on Speckle Metrology; 108340S (2018) https://doi.org/10.1117/12.2319106
Event: SPECKLE 2018: VII International Conference on Speckle Metrology, 2018, Janów Podlaski, Poland

Abstract

Limited light source coherence can be both a complication and a benefit to interferometric optical metrology. Although high-coherence lasers are great for displacement measuring interferometry, holography, and Fizeau interferometry, many instruments rely on low coherence as part of the measurement principle. Examples include systems that separate parallel surfaces of transparent parts, coherence scanning interferometers for surface topography, and coupled-cavity fiber position sensors. In cases where high coherence is essential, there can nonetheless be a benefit to synthesizing reduced coherence to suppressing spurious fringes, coherent noise, and unwanted speckle.

Citation Download Citation

Peter J. de Groot "Applications of optical coherence in interferometric metrology", Proc. SPIE 10834, Speckle 2018: VII International Conference on Speckle Metrology, 108340S (7 September 2018); https://doi.org/10.1117/12.2319106

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