An error correction model based on neural network for laser displacement sensor

Lili Guan; Liqun Chai; Qiang Li; Yuhang He; Daoming Wan

doi:10.1117/12.2503948

31 August 2018 An error correction model based on neural network for laser displacement sensor

Lili Guan, Liqun Chai, Qiang Li, Yuhang He, Daoming Wan

Proceedings Volume 10835, Global Intelligence Industry Conference (GIIC 2018); 108350F (2018) https://doi.org/10.1117/12.2503948
Event: Global Intelligent Industry Conference 2018, 2018, Beijing, China

Abstract

Laser trigonometric displacement sensor has characteristics of high efficiency, non-contact and large-scale measurement range, when coupled with scanning system, it can be widely used in profile measurement of complex workpiece surface. But for large steep workpieces, the axis of incident light emitted from the sensor can’t be perpendicular to its surface, accuracy will be largely degraded by this inclination angle. Also, the relationship between error and influencing factors dominated by inclination angle is a nonlinear function. If the influence of measuring distances is taken into account, the relationship becomes a multivariate mapping. So an improved multi-layer BP neural network is proposed to compensate for errors. This paper uses the genetic algorithm to optimize the initialization parameters of the network, while using adaptive training method to optimize the convergence process and adjusting the learning rate, increasing the momentum item to avoid falling into local extreme points. Besides, the laser displacement sensor of Keyence LK-H020 is used to obtain the measurement data and the error was obtained by comparing with a grating ruler with a precision of 10 nm. Based on the simulation and experimental results, the method can reduce the error from 3.8 μm to 0.5 μm when inclination range is from 0° to 8°, and from 7μm to 3 μm when the angle is from 0° to 50°. The results prove effectiveness, generalization and robustness of the algorithm.

Citation Download Citation

Lili Guan, Liqun Chai, Qiang Li, Yuhang He, and Daoming Wan "An error correction model based on neural network for laser displacement sensor", Proc. SPIE 10835, Global Intelligence Industry Conference (GIIC 2018), 108350F (31 August 2018); https://doi.org/10.1117/12.2503948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available