A novel method for measuring and correcting the surface shape error of the pitch lap in the full-aperture continuous polishing

Defeng Liao; Ruiqing Xie; Shijie Zhao; Lele Ren; Yiren Wang

doi:10.1117/12.2505902

16 January 2019 A novel method for measuring and correcting the surface shape error of the pitch lap in the full-aperture continuous polishing

Defeng Liao, Ruiqing Xie, Shijie Zhao, Lele Ren, Yiren Wang

Author Affiliations +

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 108381A (2019) https://doi.org/10.1117/12.2505902
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Continuous polishing is a significant process to fabricate optical workpiece with nano figure precision. The figure of the optical workpiece is to a large extent dependent on the surface shape of the pitch lap. In this study, a novel method is proposed to determine the lap shape error by moving the measurement point in a generally radial direction while the lap rotates and correct the lap shape error by employing a small heat tool considering its viscoelastic property. It is validated that the surface shape error of the pitch lap can be corrected dramatically by the method, and the workpiece figure attempts to target the lap shape so as to reach a uniform material removal.

Citation Download Citation

Defeng Liao, Ruiqing Xie, Shijie Zhao, Lele Ren, and Yiren Wang "A novel method for measuring and correcting the surface shape error of the pitch lap in the full-aperture continuous polishing", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108381A (16 January 2019); https://doi.org/10.1117/12.2505902

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