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18 January 2019 Optical free form surface metrology in adaptive polarized interferometry
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Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108391S (2019) https://doi.org/10.1117/12.2508395
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China
Abstract
An adaptive polarized interferometer is proposed for optical free form surfaces metrology without auxiliary devices such as the wavefront sensors and deflectometry systems for deformable mirror (DM) monitoring. In this method, the DM surface monitoring and free form surface measurement are achieved simultaneously in only one interferometer by the polarizing design. The polarizing design divide the interferometer into two partial common path interferometric system, which provide the null test for tested free form surface and non-null test for the DM surface. The final figure error of the free form surface is extracted by ray tracing. Experiments proving the feasibility of this interferometer is shown.
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Lei Zhang, Sheng Zhou, Jingsong Li, and Benli Yu "Optical free form surface metrology in adaptive polarized interferometry", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391S (18 January 2019); https://doi.org/10.1117/12.2508395
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