Measurement of optical intercept of micro lens arrays

Guobing Tian; Feng Xu; Yujia Yao; Mingyang Shang; Chunlei Xing

doi:10.1117/12.2506683

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24 January 2019 Measurement of optical intercept of micro lens arrays

Guobing Tian; Feng Xu; Yujia Yao; Mingyang Shang; Chunlei Xing

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Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 108400Z (2019) https://doi.org/10.1117/12.2506683
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

At present, micro lens arrays have been widely used in the fields of infrared detection, light gathering, portable solar battery and so on. The focusing and imaging properties of micro lens arrays are closely related to the performance parameters such as point diffusion function, diffraction efficiency and optical intercept. In order to better evaluate the quality of micro lens, this paper introduces a method for accurately measuring the optical intercept of micro lens arrays, which is more precise and has less deviation than interferometry, CCD direct imaging and so on. This experiment is based on the principle of CCD imaging and image processing, and a set of testing system is established. The system is mainly composed of a laser light source, a collimation system, samples and a camera. After many experiments, The optical post intercept detection device can obtain test accuracy below 5μm

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Guobing Tian, Feng Xu, Yujia Yao, Mingyang Shang, and Chunlei Xing "Measurement of optical intercept of micro lens arrays", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 108400Z (24 January 2019); https://doi.org/10.1117/12.2506683

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