Research on micro displacement measurement technology based on chromatic confocal method

Yuejing Qi; Zengxiong Lu; Jing Ma; Guanghua Yang; Qingyang Zhang; Bing Li; Wei Qi; Jiani Su

doi:10.1117/12.2505383

24 January 2019 Research on micro displacement measurement technology based on chromatic confocal method

Yuejing Qi, Zengxiong Lu, Jing Ma, Guanghua Yang, Qingyang Zhang, Bing Li, Wei Qi, Jiani Su

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 108401G (2019) https://doi.org/10.1117/12.2505383
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Compared with other non-contact displacement sensors, the chromatic confocal sensor, which based on wavelengthdisplacement modulation technique, has no special requirements on the material and texture of the measured surface, and suitable for measuring the displacement of objects whose size range from micro to macro with high precision. In this paper, the chromatic confocal method is applied to measure the micro displacement. A hyperchromats with a measurement range of 1.27mm and linear regression coefficient R² of 0.996 has been designed by using ZEMAX optical design software. The experimental system of chromatic confocal displacement measurement is set up. Through two miniature fiber optic spectrometers, the large measurement range and high precision spectrum detection are realized. The system error is calibrated synthetically. The measurement range of 1.2mm and linear regression coefficient R² of 0.997 is realized. The research results are of great significance for the development of micro-nanometer displacement measurement technology.

Citation Download Citation

Yuejing Qi, Zengxiong Lu, Jing Ma, Guanghua Yang, Qingyang Zhang, Bing Li, Wei Qi, and Jiani Su "Research on micro displacement measurement technology based on chromatic confocal method", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 108401G (24 January 2019); https://doi.org/10.1117/12.2505383

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