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6 February 2019 Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding
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Abstract
For the purpose of ultra-precision grinding large scale and complex off-axis aspheric optics effectively and automatically, computer-aided NC programming system was developed in this article. First the mathematical model of aspheric parallel grinding was analyzed, and the manufacture process of aspheric grinding is designed. Then the system architecture was established, which included initial grinding module, on-machine measuring module and error compensation grinding module. After inputting process and aspheric parameters, the system could calculate the grinding wheel X/Z/Y coordinates precisely and simulate the grinding pathway automatically, and then create grinding CNC program, which could control the grinding wheel to move along the aspheric surface. And the on-machine measurement CNC program was created to acquire the form error by displacement sensor. By combining the form error with the aspheric surface coordinates, the grinding wheel coordinates could be calculated and compensation machining CNC program was created. Using this system to manufacturing one large scale and off-axis aspheric optics, the PV of final form error was below 3.0μm, and the RMS was below 0.5μm.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Zhou, Q. C. Wei, S. J. Zhao, Q. H. Zhang, J. Wang, and Q. Xu "Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 108420V (6 February 2019); https://doi.org/10.1117/12.2504960
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