Parameters selection for different metals in coating thickness measurement using x-ray fluorescence analysis

Jie Rong; Xiaoping Zhu; Kai Wang; Hua Du

doi:10.1117/12.2504972

6 February 2019 Parameters selection for different metals in coating thickness measurement using x-ray fluorescence analysis

Jie Rong, Xiaoping Zhu, Kai Wang, Hua Du

Author Affiliations +

Proceedings Volume 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology; 108420W (2019) https://doi.org/10.1117/12.2504972
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

X-ray fluorescence analysis (XRFA) is a method which is widely used in measuring thin coating thickness. For metal coatings, the chemical and physical properties vary from metal to metal and their sensitivities to measurement parameters are also different. Thus, using the same parameters to measure different metal coatings would affect the measurement accuracy. In this article, the effects of the primary filter, substrate material and high voltage on different metal thickness measurement are presented. Six kinds of common plating materials (Au, Ni, Al, Sn, Ag, Zn) are used in the experiments. The experimental results also illustrate the differences in parameters selection of light metal Al and other heavy metals and analyze the reasons for this difference.

Citation Download Citation

Jie Rong, Xiaoping Zhu, Kai Wang, and Hua Du "Parameters selection for different metals in coating thickness measurement using x-ray fluorescence analysis", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 108420W (6 February 2019); https://doi.org/10.1117/12.2504972

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